A monolithic 3D fully-differential CMOS accelerometer

3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Volumn , Issue , 2008, Pages 1067-1070

  Tsai, Ming Han ^a   Sun, Chih Ming ^a   Wang, Chuanwei ^a   Lu, Jrhoung ^b   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b PIXART IMAGING INC   (Taiwan)

Author keywords

3D; Accelerometer; CMOS; Fully differential

Indexed keywords

DIFFERENTIAL AMPLIFIERS; ETCHING; METALS; SENSORS;

3D; ACCELEROMETER; CMOS; CMOS PROCESSING; COUPLING RATIOS; DIFFERENTIAL CAPACITANCE; DRY-ETCHING; FULLY-DIFFERENTIAL; IN-PLANE; INERTIA SENSOR; INTERNATIONAL CONFERENCES; MEASUREMENT RESULTS; MOLECULAR SYSTEMS; OUT-OF PLANE; SINGLE CHIPS; WET-ETCHING;

ACCELEROMETERS;

EID: 50249136123     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2008.4484503     Document Type: Conference Paper

References (10)

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