Integrated MEMS LC resonator with sealed air-suspended structure for single-chip RF LSIs

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2007, Pages 423-426

  Kuwabara, K ^a   Sato, N ^a   Morimura, H ^a   Kodate, J ^a   Nakamura, M ^a   Ugajin, M ^a   Kamei, T ^b   Kudou, K ^b   Machida, K ^b   Ishii, H ^a  

^a NTT CORPORATION   (Japan)

^b NTT Advanced Technology Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHIP SCALE PACKAGES; COMPOSITE MICROMECHANICS; ELECTRON DEVICES; ELECTRONIC EQUIPMENT MANUFACTURE; LSI CIRCUITS; MEMS; METALS; OSCILLATORS (ELECTRONIC); RESONATORS; VARACTORS;

APPLIED VOLTAGES; INTEGRATED MEMS; LC RESONATORS; MEMS INDUCTORS; QUALITY FACTOR; SINGLE CHIPS; SUSPENDED STRUCTURES; TUNING RATIO; VOLTAGE-CONTROLLED OSCILLATOR;

MICROELECTROMECHANICAL DEVICES;

EID: 50249134337     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2007.4418963     Document Type: Conference Paper

References (8)

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