Novel Fabrication Process and Structure of a Low-Voltage-Operation Micromirror Array for Optical MEMS Switches

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2003, Pages 965-968

  Urano, M ^a   Ishii, H ^a   Tanabe, Y ^a   Shimamura, T ^a   Sakata, T ^a   Kamei, T ^b   Kudou, K ^b   Yano, M ^b   Machida, K ^a  

^a NTT CORPORATION   (Japan)

^b NTT Advance Technology Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ELECTRIC WIRE; ELECTRODES; ELECTROPLATING; ETCHING; FINITE ELEMENT METHOD; LSI CIRCUITS; MICROPROCESSOR CHIPS; NATURAL FREQUENCIES; OPTICAL SWITCHES; OPTIMIZATION; PHOTOLITHOGRAPHY; POLYIMIDES; SCREEN PRINTING; SILICON ON INSULATOR TECHNOLOGY;

DRIVE VOLTAGE; MICROMIRROR ARRAYS; ROTATIONAL ANGLE;

MICROELECTROMECHANICAL DEVICES;

EID: 0842266487     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. V. A. Aksyuk, F. Pardo, C. A. Boees, S. Arnery, C. R. Giles, and D. J. Bishop, "Lucent Microstart™ Micromirror Array Technology for Large Optical Crossconnects", Proc. MOEMS and Miniaturized Systems, SPIE, vol. 4178, pp.320-324, September 2000.
2. D. J. Bishop, C. R. Giles, and G. P. Austin, "The Lucent LambdaR-outer: MEMS Technology of the Future Here Today", IEEE Communications Magazine, pp75-79, March 2002
3. S. Blackstone and T. Brosnihan, "SOI MEMS technologies for Optical Switching", Proc. of Optical MEMS 2001, pp35-36, August 2001.
4. R. Sawada, J. Yamaguchi, E. Higurashi, A. Shimizu, T. Yamamoto, N. Takeuchi and Y. Uenishi, "Single Si Crystal 1024ch MEMS Mirror Based on Terraced Electrodes and High-Aspect Ratio Torsion Spring for 3-D Cross-Connect Switch", Proc. of Optical MEMS 2002, pp11-12, August 2002
5. H. Ishii, Y. Tanabe, T. Shimamura, J. Yamaguchi, M. Urano, T. Kamei, K. Kudou, M. Yano, Y. Uenishi, and K. Machida, "Fabrication of Optical MEMS Switches Having Multilevel Mirror-Drive Electrodes", Proc. of Optical MEMS 2003, pp121-122, August 2003.