Fabrication of silicon nanowire for biosensor applications

Proceedings of IEEE Sensors

Volumn , Issue , 2006, Pages 1269-1271

  Lee, Kook Nyung ^a   Jung, Suk Won ^a   Kim, Won Hyo ^a   Lee, Min Ho ^a   Seong, Woo Kyeong ^a   Kim, Mira ^b   Lee, Yoon Sik ^b  

^a Korea Electronic Technology Institute (KETI)   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BIOSENSORS; CHEMICAL OXYGEN DEMAND; CHLORINE COMPOUNDS; CRYSTALLINE MATERIALS; FUNCTIONAL GROUPS; LITHOGRAPHY; MACHINING; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOWIRES; NONMETALS; OPTICAL DESIGN; OXIDATION; SENSORS; SILICON;

ASSEMBLY PROCESSING; BIOSENSOR APPLICATIONS; CHEMICAL-; CONTACT ELECTRODES; I-V CHARACTERISTICS; MICRO-MACHINING; NANOWIRE FABRICATION; SENSOR APPLICATIONS; SILICON NANOWIRE ARRAY; SILICON-NANOWIRE; SINGLE CRYSTALLINE SILICON; SUB-100 NM;

ELECTRIC WIRE;

EID: 50149110924     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.355860     Document Type: Conference Paper

References (7)

1. X. Duan, C. NIu, V. Sahi, J.Chen, J. Parce, S. Empedocles, J. Goldman, Nature, 425, 274 (2003)
2. Y. Cui, C. M. Lieber, Science 291, 851 (2001).
3. A. M. Morales, C. M. Lieber, Science 279, 208 (1998)
4. Y. Cui, Q. Wei, H. Park, C. M. Lieber, Science 293, 1289 (2003).
5. G. Zheng, F. Patolsky, Y. Cui, W. U. Wang, C. M. Lieber, Nature Biotech., 23(10) (2005)
6. J. Kedzierski and J. Bokor, J. Vac. Sci. Technol. B 15(6), 2825 (1997)
7. O. H. Elibol, D. Morisette, D. Akin, J. P. Denton, and R. Bashira, App. Phy. Let., 83(22), 4613 (2003).