Tunable SPR coupler by flexible polymer grating

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 774-777

  Kan, T ^a   Binh Khiem, N ^a   Matsumoto, K ^a   Shimoyama, I ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; POLYMERS; REACTIVE ION ETCHING;

COUPLING CONDITIONS; FLEXIBLE POLYMERS; GRATING PITCH; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; NANO SCALING; SPR (SURFACE PLASMON RESONANCE);

SURFACE PLASMON RESONANCE;

EID: 50149096196     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443771     Document Type: Conference Paper

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