Electrically driven varifocal micro lens fabricated by depositing parylene directly on liquid

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 305-308

  Nguyen, Binh Khiem ^a   Iwase, Eiji ^a   Matsumoto, Kiyoshi ^a   Shimoyama, Isao ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CLADDING (COATING); COMPOSITE MICROMECHANICS; DROP FORMATION; DROPS; EXPERIMENTS; FLUID MECHANICS; LENSES; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROLENSES; OPTICAL DESIGN; OPTICAL INSTRUMENTS; PROCESS ENGINEERING; REACTIVE ION ETCHING;

APPLIED VOLTAGES; CALCULATION MODELS; CHEMICAL VAPORS; EXPERIMENTAL MEASUREMENTS; FABRICATION PROCESSES; FLUID-FILLED; FOCAL LENGTHS; GLASS WAFERS; HIGH VACUUM; INITIAL VALUES; INTERNATIONAL CONFERENCES; LENS ARRAYS; LIQUID LENSES; LIQUID SURFACES; MICRO CHAMBERS; MICRO LENSING; MICRO-ELECTRO MECHANICAL SYSTEMS; PARYLENE; PARYLENE FILM;

CHEMICAL VAPOR DEPOSITION;

EID: 43349107107     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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