Enabling MEMS chemical microsensor arrays for trace analyte detection

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2397-2400

  Meier, Douglas C ^a   Evju, Jon K ^a   Benkstein, Kurt D ^a   Raman, Baranidharan ^a   Boger, Zvi ^a   Lahr, David L ^a   Semancik, Steve ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Array; Conductance; MEMS; Metal oxide; Microhotplate; Neural networks; Temperature

Indexed keywords

ACTUATORS; ARTIFICIAL INTELLIGENCE; COMPOSITE MICROMECHANICS; CONCENTRATION (PROCESS); DATA ACQUISITION; DATA PROCESSING; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; MICROSYSTEMS; NANOSENSORS; SENSORS; SIGNAL ANALYSIS; SIGNAL PROCESSING; TECHNOLOGY TRANSFER; TRACE ELEMENTS; TRANSDUCERS;

ANALYSIS TECHNIQUES; ANALYTE DETECTION; ARRAY; ARTIFICIAL NEURAL NETWORKS; CHEMICAL-; CONDUCTANCE; CONDUCTOMETRIC; DATA STREAMING; INFORMATION CONTENTS; INTERNATIONAL CONFERENCES; LOW CONCENTRATIONS; METAL OXIDE; MICRO HOT PLATES; MICROELEMENTS; MICROHOTPLATE; MICROSENSOR ARRAYS; NANO-STRUCTURED; OPERATIONAL MODES; PROCESSING METHODS; RECOGNITION ALGORITHMS; SEMICONDUCTING OXIDES; SENSING FILMS; SENSING MATERIALS; SIGNAL QUALITY; SOLID-STATE SENSORS; TARGET ANALYTES; TEMPERATURE;

NEURAL NETWORKS;

EID: 50049118795     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300653     Document Type: Conference Paper

References (8)

1. S. Semancik and R. E. Cavicchi, "Kinetically-Controlled Chemical Sensing Using Micromachined Structures", Acc. Chem. Res., Vol. 31, pp. 279-287, 1998.
2. Z. Boger, "Selection of Quasi-Optimal Inputs in Chemometrics Modeling by Artificial Neural Network Analysis", Anal. Chim. Acta, Vol. 490, pp. 31-40, 2003.
3. R. E. Cavicchi, S. Semancik, F. DiMeo, and C. J. Taylor, "Use of Microhotplates in the Controlled Growth and Characterization of Metal Oxides for Chemical Sensing," J. Electroceramics, Vol. 9, pp. 155-164, 2003.
4. C. J. Taylor and S. Semancik, "The Use of Microhotplate Arrays as Microdeposition Substrates for Materials Exploration", Chem. Mater., Vol. 14, pp. 1671-1677, 2002.
5. C. J. Martinez, C. B. Montgomery, B. Hockey and S. Semancik, "Porous Tin Oxide Nanostructured Microspheres for Sensor Applications", Langmuir, Vol. 21, pp. 7937-7944,2005.
6. K. D. Benkstein, C. J. Martinez, G. Li, D. C. Meier, C. B. Montgomery, S. Semancik, "Integration of Nanostructured Materials with MEMS Microhotplate Platforms to Enhance Chemical Sensor Performance", J. Nanoparticle Res., Vol. 8, pp. 809-822, 2006.
7. D. C. Meier, C. J. Taylor, R. E. Cavicchi, E. White V, S. Semancik, E. W. Ellzy and K. B. Sumpter, "Chemical Warfare Agent Detection Using MEMS-Compatible Microsensor Arrays", IEEE Sensors Journal, Vol. 5, pp. 712-725, 2005.
8. B. Raman, D. C. Meier and S. Semancik (manuscript in preparation).