Use of microhotplates in the controlled growth and characterization of metal oxides for chemical sensing

Journal of Electroceramics

Volumn 9, Issue 3, 2002, Pages 155-164

  Cavicchi, R E ^a   Semancik, S ^a   DiMeo Jr , F ^a   Taylor, C J ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Chemical vapor deposition; Gas sensor; Membrane; Microhotplate; Micromachined; Tin oxide

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRODES; EVAPORATION; FILM GROWTH; OXIDES; SCREEN PRINTING; SPIN COATING; SPUTTERING; SUBSTRATES; TEMPERATURE CONTROL; TIN COMPOUNDS;

DROP DEPOSITION; METAL OXIDES; MICROHEATER; MICROHOTPLATES;

CHEMICAL SENSORS;

EID: 0037677828     PISSN: 13853449     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1023224123925     Document Type: Article

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