Half-millimeter-range vertically scanning microlenses for microscopic focusing applications

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2006, Pages 74-77

  Jain, Ankur ^a   Xie, Huikai ^a  

^a J Crayton Pruitt Family Department of Biomedical Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MICROLENSES; MICROMACHINING; MICROSYSTEMS; PHOTORESISTS; SCANNING;

ACTUATION VOLTAGES; LARGE VERTICAL DISPLACEMENT MICROACTUATORS; LOW ACTUATION VOLTAGE; MICROMACHINING PROCESS; OPTICAL COHERENCE MICROSCOPY; PHOTORESIST REFLOW TECHNIQUE; POLYMER MICROLENSE; VERTICAL DISPLACEMENTS;

SOLID-STATE SENSORS;

EID: 85010011449     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. H. Toshiyoshi, G. –D. J. Su, J. LaCosse, and M. C. Wu, “A surface micromachined optical scanner array using photoresist lenses fabricated by a thermal reflow process,” Journal of Lightwave Technology 21, pp. 1700-1708 (2003).
2. S. Kwon, V. Milanovic, and L. P. Lee, “Vertical microlens scanner for 3D imaging,” 2002 Solid State Sensor and Actuator Workshop, Hilton Head, SC, June 2002, pp. 227-230.
3. S.–H. Kim, Y. Yee, J. Choi, H. Kwon, M.–H. Ha, C. Oh, and J. U. Bu, “Integrated micro optical flying head with lens positioning actuator for small form factor data storage,” Transducers 2003, Boston, MA, June 2003, pp. 607-610.
4. S. Kuiper and B. H. W. Hendriks, “Variable-focus liquid lens for miniature cameras,” Applied Physics Letters 85, pp. 1128-1130 (2004).
5. N. Chronis, G. L. Liu, K. –H. Jeong, and L. P. Lee, “Tunable liquid-filled microlens array integrated with microfluidic network,” Optics Express 11, pp. 2370-2378, (2003).
6. W. Wang, J. Fang, and K. Varahramyan, “Compact variable-focusing microlens with integrated thermal actuator and sensor,” IEEE Photonics Technology Letters 17, pp. 2643-2645 (2005).
7. A. D. Aguirre, P. Hsiung, T. H. Ko, I. Hartl, and J. G. Fujimoto, “High-resolution optical coherence microscopy for high-speed, in vivo cellular imaging,” Optics Letters 28, pp. 2064-2066, (2003).
8. A. Jain, H. Qu, S. Todd, G. K. Fedder, and H. Xie, “Electrothermal SCS micromirror with large-vertical-displacement actuation,” 2004 Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head, SC, June 2004, pp. 228-231.
9. H. Toshiyoshi, G. –D. J. Su, J. LaCosse, and M. C. Wu, “A surface micromachined optical scanner array using photoresist lenses fabricated by a thermal reflow process,” Journal of Lightwave Technology 21, pp. 1700-1708 (2003).
10. A. Jain, S. Todd, and H. Xie, “An electrothermally-actuated, dual-mode micromirror for large bi-directional scanning,” IEDM 2004, San Francisco, CA, December 2004, pp. 47-50.
11. A. L. Glebov, L. Huang, S. Aoki, M. Lee, and K. Yokouchi, “Planar hybrid polymer-silica microlenses with tunable beamwidth and focal length,” IEEE Photonics Technology Letters 16, pp. 1107-1109 (2004).
12. D. Daly, Microlens Arrays, Taylor & Francis: London, 2001.