Stacked SiO2/Si nanonail array fabricated by spacer technology for biomedical applications

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1609-1612

  Han, X ^a   Luo, H ^a   Wu, W G ^a   Xu, J ^a   Yan, G Z ^a   Jin, Y F ^a   Hao, Y L ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

Nano water droplet; Protein localization; Spacer technology; Stacked nanonail array

Indexed keywords

ACTUATORS; MICROSYSTEMS; SENSORS; SILICON; SILICON COMPOUNDS;

INTERNATIONAL CONFERENCES; NANO WATER DROPLET; PROTEIN LOCALIZATION; SOLID-STATE SENSORS; SPACER TECHNOLOGY; STACKED NANONAIL ARRAY;

TRANSDUCERS;

EID: 50049083525     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300456     Document Type: Conference Paper

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