Micro injection molding for mass production using LIGA mold inserts

Microsystem Technologies

Volumn 14, Issue 9-11, 2008, Pages 1507-1514

  Katoh, Takanori ^a   Tokuno, Ryuichi ^a   Zhang, Yanping ^a   Abe, Masahiro ^a   Akita, Katsumi ^a   Akamatsu, Masaharu ^a  

^a SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIE CASTING INSERTS; FLUID MECHANICS; FORMING; INJECTION MOLDING; MACHINE TOOLS; MOLDING; MOLDS; PHOTORESISTS; PLASTIC MOLDS; PRESSURE DROP; PRODUCTION ENGINEERING; TECHNOLOGY;

HIGH ASPECT RATIOS; HIGH-ASPECT-RATIO MICROSTRUCTURES; KEY TECHNOLOGIES; MASS-PRODUCTION; MICRO PARTS; MICRO-INJECTION MOLDING; MICRO-MOLDING; MOLD INSERTS;

ASPECT RATIO;

EID: 49949100229     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0533-8     Document Type: Conference Paper

References (19)

1. 2 and injection compression molding for fine pattern replication. Plast Age (Japanease) 49(2):101-103
2. Becher EW, Ehrfeld W, Hagmann P, Maner A, Muenchmeyer D (1986) Fabrication of microstructures with high aspect ratio and great structural heights by synchrotron radiation lithography, electroforming and plastic molding (LIGA process). Microelectron Eng 4:35-56
3. Datta P, Goettert J (2007) Method for polymer hot embossing process development. Microsyst Technol 13:265-270
4. Despa MS, Kelly KW, Collier JR (1999) Injection molding of polymeric LIGA HARMs. Microsyst Technol 6:60-66
5. Guckel H (1996) Deep X-ray lithography for micromechanics and precision engineering, Rev. Sci Instrum 67:3357
6. Haverkamp V, Ehrfeld W, Gebauer K, Hessel V, Löwe H, Richter T, Wille C (1999) The potantial of micromixers for contacting of disperse liquid phases. Fresenius J Anal Chem 364:617-624
7. Heckele M, Bacher W, Müller KD (1998) Hot embossing - the molding technique for plastic microstructures. Microsyst Technol 4:122-124
8. Hirose S, Miyatake T, Li X, Toyota E, Hirose M, Fujii K, Suzuki K (2000) Performance of a compact beamline with high brightness for X-ray lithography. J Vac Sci Technol B18:2986-2989
9. Hori T, Takayama T (1995) 4th international conference on synchrotron radiation sources and 2nd Asian forum on synchrotron radiation (proceedings). POSTECH, Pohang, pp 148-158
10. Michaeli W, Rogalla A (1996) Moulding in miniature. Eur Plast News, April: 45
11. Morton KJ, Strum JC, Austin RH, Chou SY (2006) Nanoimprinted fluidic device for continuous separation of nanoparticles. Proc of μ TAS 1:1014-1016
12. Piotter V, Benzler T, Hanemann T, Wöllmer H, Ruprecht R, Haußelt J (1999) Innovative molding technologies for the fabrication of components for microsystems. SPIE 3680:456-463
13. Piotter V, Mueller K, Plewa K, Ruprecht R, Hausselt J (2002) Performance and simulation of thermoplastic micro injection molding. Microsyst Technol 8:387-390
14. Ruprecht R, Bacher W, Hausselt J, Piotter V (1995) Injection molding of LIGA and LIGA-similar microstructures using filled and unfilled thermoplastics. SPIE 2639:146-157
15. Simoide K, Mawatari K, Mukaiyama S, Fukui H (2002) Bio-chemical analysis on microfabricated polymer chips. Proc of μTAS 2:918-921
16. Wallabe et al (2001) RibCon: Micromolded easy-assembly multi fiber connector for single- and multi-mode applications. Proc of DTIP conference. SPIE 4408:478-485
17. 2. Plast Age (Japanese) 47(6):136-139
18. Yorita J, Numasawa T, Hirata Y (2004) Manufacturing technology of micromold inserts and micromolding. High Polym 53(5):322-325
19. Zhang Y, Katoh T (1996) Synchrotron radiation micromachining of polymers to produce high-aspect-ratio microparts. Jpn J Appl Phys 35:L186-L188