Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique

Microsystem Technologies

Volumn 14, Issue 9-11, 2008, Pages 1745-1750

  Dai, Wen ^a   Wang, Wanjun ^a  

^a Louisiana State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ASPECT RATIO; BUILDING MATERIALS; COMPOSITE MICROMECHANICS; COPPER; ELECTROLESS PLATING; MEMS; METALLIZING; MICROACTUATORS; MICROCRYSTALLINE SILICON; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; NONMETALS; OPTICAL DESIGN; PHOTORESISTS; PLATING; PRESSURE DROP; RESEARCH; SILICON; TECHNOLOGY;

COMB DRIVES; FABRICATION PROCESSES; FABRICATION TECHNOLOGIES; HIGH ASPECT RATIO; MEMS DEVICES; METALLIZATION; MULTI LAYERING; MULTI-STEP; RECENT PROGRESS; RESEARCH WORKS; SILICON SUBSTRATES; STRUCTURAL MATERIALS; SU-8 POLYMER; ULTRA-HIGH; ULTRA-VIOLET; UV-LITHOGRAPHY;

LITHOGRAPHY;

EID: 49949094157     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-008-0593-4     Document Type: Conference Paper

References (11)

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