Influence of bias voltage on the crystallographic orientation and morphology of sputter deposited yttria stabilized zirconia (YSZ) thin films

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 4, Issue 11, 2007, Pages 4288-4293

  Amaya, C ^a   Caicedo, J ^a,b   Bejarano, G ^b,d   Escobedo, C A Cortés ^c   Munoz Saldana J ^c   Zambrano, G ^a   Prieto, P ^a  

^a UNIVERSIDAD DEL VALLE   (Colombia)

^b Hard Coatings Laboratory   (Colombia)

^c DEPARTAMENTO DE FÍSICA   (Mexico)

^d UNIVERSIDAD DE ANTIOQUIA   (Colombia)

Author keywords

[No Author keywords available]

Indexed keywords

BIAS-VOLTAGE; CRYSTALLOGRAPHIC ORIENTATIONS; NOVEL MATERIALS; YTTRIA-STABILIZED ZIRCONIA THIN FILMS;

SPUTTERING; THICK FILMS; ZIRCONIA;

YTTRIA STABILIZED ZIRCONIA;

EID: 49549105332     PISSN: 18626351     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssc.200675925     Document Type: Conference Paper

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