SCOPUS 정보 검색 플랫폼

Volumn 151, Issue 9, 2004, Pages

Effect of mechanical properties of PVA brush rollers on frictional forces during post-CMP scrubbing

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; FORCE CONTROL; FRICTION; GLASS TRANSITION; GRAPH THEORY; PARAMETER ESTIMATION; SILICON WAFERS;

COEFFICIENT OF FRICTION (COF); FRICTIONAL FORCES; POST-CHEMICAL MECHANICAL PLANARIZATION (CMP); SCRUBBING;

POLYVINYL ALCOHOLS;

EID: 4944245446 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1782092 Document Type: Article

Times cited : (22)

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