SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 596, Issue , 2000, Pages 103-108

PT film growth with tetra-kis(triflurophosphine)platinum

(7) Sun, Y M a Lozano, J a Mettlach, N a Ekerdt, J G a Madhukar, S b Hance, R L b White, J M a

a The University of Texas at Austin (United States)

b MOTOROLA INC (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; COMPOSITION EFFECTS; DEPOSITION; FILM GROWTH; IRIDIUM; OXYGEN; SCANNING ELECTRON MICROSCOPY; SILICON NITRIDE; SUBSTRATES; THERMAL EFFECTS; TITANIUM NITRIDE;

BARIUM STRONTIUM TITANATE; SILICON OXIDE; TETRA-KIS TRIFLUOROPHOSPHINE PLATINUM;

PLATINUM;

EID: 0033712298 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (1)

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