SCOPUS 정보 검색 플랫폼

Applied Physics Letters

Volumn 93, Issue 4, 2008, Pages

Thermal conductivity of ultrathin tetrahedral amorphous carbon films

(5) Balandin, A A a Shamsa, M a,c Liu, W L a,d Casiraghi, C a,e Ferrari, A C b

a UNIVERSITY OF CALIFORNIA (United States)

b UNIVERSITY OF CAMBRIDGE (United Kingdom)

c INTEL CORPORATION (United States)

d Touchdown Technologies (United States)

e FREIE UNIVERSITÄT BERLIN (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SILICON; CARBON FILMS; ELASTIC MODULI; INTERFACES (MATERIALS); THERMAL CONDUCTIVITY; ULTRATHIN FILMS;

FILM-THICKNESS; FINITE THICKNESS; INTERFACE LAYER; NEAR ROOM TEMPERATURE; SUB NANOMETERS; TETRAHEDRAL AMORPHOUS CARBON FILMS; THERMAL TRANSPORT; ULTRA-THIN; YOUNG MODULUS;

AMORPHOUS CARBON;

EID: 49249111888 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2957041 Document Type: Article

Times cited : (81)

References (30)

1
- 0036507205
- J. A. Hutchby, G. I. Bourianoff, V. V. Zhirnov, and J. E. Brewer, IEEE Circuits Devices Mag. 21, 28 (2002).
- (2002) IEEE Circuits Devices Mag. , vol.21 , pp. 28
- Hutchby, J.A.¹ Bourianoff, G.I.² Zhirnov, V.V.³ Brewer, J.E.⁴

2
- 0042444077
- edited by F. Seitz and D. Turnbull (Academic, New York), Vol.,.
- P. G. Klemens, Solid State Physics, edited by, F. Seitz, and, D. Turnbull, (Academic, New York, 1958), Vol. 7, p. 1.
- (1958) Solid State Physics , vol.7 , pp. 1
- Klemens, P.G.¹

3
- 33750171443
- M. Shamsa, W. L. Liu, A. A. Balandin, C. Casiraghi, W. I. Milne, and A. C. Ferrari, Appl. Phys. Lett. 89, 161921 (2006).
- (2006) Appl. Phys. Lett. , vol.89 , pp. 161921
- Shamsa, M.¹ Liu, W.L.² Balandin, A.A.³ Casiraghi, C.⁴ Milne, W.I.⁵ Ferrari, A.C.⁶

4
- 47249085994
- G. Aichmayr, A. Avellan, G. S. Duesberg, F. Kreupl, S. Kudelka, M. Liebau, A. Orth, A. Sanger, J. Schumann, and O. Storbeck, Tech. Dig. VLSI Symp. (2007), 186.
- Tech. Dig. VLSI Symp. , vol.2007 , pp. 186
- Aichmayr, G.¹ Avellan, A.² Duesberg, G.S.³ Kreupl, F.⁴ Kudelka, S.⁵ Liebau, M.⁶ Orth, A.⁷ Sanger, A.⁸ Schumann, J.⁹ Storbeck, O.¹⁰

5
- 16744363727
- A. C. Ferrari, Surf. Coat. Technol. 180-180, 190 (2004).
- (2004) Surf. Coat. Technol. , vol.180 , pp. 190
- Ferrari, A.C.¹

6
- 34249907409
- C. Casiraghi, J. Robertson, and A. C. Ferrari, Mater. Today 10, 42 (2007).
- (2007) Mater. Today , vol.10 , pp. 42
- Casiraghi, C.¹ Robertson, J.² Ferrari, A.C.³

7
- 0001373871
- J. P. Sulllivan, T. A. Friedmann, and K. Hjort, MRS Bull. 26, 309 (2001).
- (2001) MRS Bull. , vol.26 , pp. 309
- Sulllivan, J.P.¹ Friedmann, T.A.² Hjort, K.³

8
- 0034667001
- A. C. Ferrari, A. Libassi, B. K. Tanner, V. Stolojan, J. Yuan, L. M. Brown, S. E. Rodil, B. Kleinsorge, and J. Robertson, Phys. Rev. B 62, 11089 (2000).
- (2000) Phys. Rev. B , vol.62 , pp. 11089
- Ferrari, A.C.¹ Libassi, A.² Tanner, B.K.³ Stolojan, V.⁴ Yuan, J.⁵ Brown, L.M.⁶ Rodil, S.E.⁷ Kleinsorge, B.⁸ Robertson, J.⁹

9
- 0028513668
- C. J. Morath, H. J. Maris, J. J. Cuomo, D. L. Pappas, A. Grill, V. V. Patel, J. P. Doyle, and K. L. Saenger, J. Appl. Phys. 76, 2636 (1994).
- (1994) J. Appl. Phys. , vol.76 , pp. 2636
- Morath, C.J.¹ Maris, H.J.² Cuomo, J.J.³ Pappas, D.L.⁴ Grill, A.⁵ Patel, V.V.⁶ Doyle, J.P.⁷ Saenger, K.L.⁸

10
- 0000017809
- A. J. Bullen, K. E. O'Hara D. G. Cahill, O. Monteiro, and A. Keudell, J. Appl. Phys. 88, 6317 (2000).
- (2000) J. Appl. Phys. , vol.88 , pp. 6317
- Bullen, A.J.¹ O'Hara, K.E.² Cahill, D.G.³ Monteiro, O.⁴ Keudell, A.⁵

11
- 0345589051
- W. Hurler, M. Pietralla, and A. Hammerschmidt, Diamond Relat. Mater. 4, 954 (1995).
- (1995) Diamond Relat. Mater. , vol.4 , pp. 954
- Hurler, W.¹ Pietralla, M.² Hammerschmidt, A.³

12
- 0004190516
- (Oxford, London).
- J. M. Ziman, Electrons and Phonons (Oxford, London, 1960).
- (1960) Electrons and Phonons
- Ziman, J.M.¹

13
- 0001129497
- 0163-1829 10.1103/PhysRevB.58.1544, ();, J. Appl. Phys. 89, 2932 (2001).
- A. Balandin and K. L. Wang, Phys. Rev. B 0163-1829 10.1103/PhysRevB.58. 1544 58, 1544 (1998); J. Zou and A. Balandin, J. Appl. Phys. 89, 2932 (2001).
- (1998) Phys. Rev. B , vol.58 , pp. 1544
- Balandin, A.¹ Wang, K.L.² Zou, J.³ Balandin, A.⁴

14
- 4243386780
- C. A. Davis, G. A. Amaratunga, and K. Knowles, Phys. Rev. Lett. 80, 3280 (1998).
- (1998) Phys. Rev. Lett. , vol.80 , pp. 3280
- Davis, C.A.¹ Amaratunga, G.A.² Knowles, K.³

15
- 0034225713
- A. Wienss, G. Persh-Schuy, R. Hartmann, P. Joeris, and U. Hartmann, J. Vac. Sci. Technol. A 18, 2023 (2000).
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 2023
- Wienss, A.¹ Persh-Schuy, G.² Hartmann, R.³ Joeris, P.⁴ Hartmann, U.⁵

16
- 0042239425
- R. Ohr, B. Jacoby, M. v. Gradowski, and C. Schug, H. Hilgers, Surf. Coat. Technol. 173, 111 (2003).
- (2003) Surf. Coat. Technol. , vol.173 , pp. 111
- Ohr, R.¹ Jacoby, B.² V. Gradowski, M.³ Schug, C.⁴ Hilgers, H.⁵

17
- 0032614086
- A. C. Ferrari, J. Robertson, M. G. Beghi, C. E. Bottani, R. Ferulano, and R. Pastorelli, Appl. Phys. Lett. 75, 1893 (1999).
- (1999) Appl. Phys. Lett. , vol.75 , pp. 1893
- Ferrari, A.C.¹ Robertson, J.² Beghi, M.G.³ Bottani, C.E.⁴ Ferulano, R.⁵ Pastorelli, R.⁶

18
- 18744396348
- M. G. Beghi, A. C. Ferrari, K. B. K. Teo, J. Robertson, C. E. Bottani, A. Libassi, and B. K. Tanner, Appl. Phys. Lett. 81, 3804 (2002).
- (2002) Appl. Phys. Lett. , vol.81 , pp. 3804
- Beghi, M.G.¹ Ferrari, A.C.² Teo, K.B.K.³ Robertson, J.⁴ Bottani, C.E.⁵ Libassi, A.⁶ Tanner, B.K.⁷

19
- 0037091062
- D. Schneider, P. Siemroth, T. Schulke, J. Berthold, B. Schultrich, and H.-H. Schneider, R. Ohr, B. Petereit, and H. Hillgers, Surf. Coat. Technol. 153, 252 (2002).
- (2002) Surf. Coat. Technol. , vol.153 , pp. 252
- Schneider, D.¹ Siemroth, P.² Schulke, T.³ Berthold, J.⁴ Schultrich, B.⁵ Schneider, H.-H.⁶ Ohr, R.⁷ Petereit, B.⁸ Hillgers, H.⁹

20
- 2442536876
- C. Casiraghi, A. C. Ferrari, J. Robertson, R. Ohr, M. V. Gradowski, D. Schneider, and H. Hilgers, Diamond Relat. Mater. 13, 1480 (2004).
- (2004) Diamond Relat. Mater. , vol.13 , pp. 1480
- Casiraghi, C.¹ Ferrari, A.C.² Robertson, J.³ Ohr, R.⁴ Gradowski, M.V.⁵ Schneider, D.⁶ Hilgers, H.⁷

21
- 36549099049
- D. G. Cahill, Rev. Sci. Instrum. 61, 802 (1990).
- (1990) Rev. Sci. Instrum. , vol.61 , pp. 802
- Cahill, D.G.¹

22
- 0001293162
- D. G. Cahill, S. K. Watson, and R. O. Pohl, Phys. Rev. B 46, 6131 (1992).
- (1992) Phys. Rev. B , vol.46 , pp. 6131
- Cahill, D.G.¹ Watson, S.K.² Pohl, R.O.³

23
- 11044229820
- 0003-6951 10.1063/1.1829168, ();, J. Appl. Phys. 0021-8979 10.1063/1.1868876 97, 073710 (2005);, Appl. Phys. Lett. 87, 202105 (2005).
- W. L. Liu and A. A. Balandin, Appl. Phys. Lett. 0003-6951 10.1063/1.1829168 85, 5230 (2004); W. L. Liu and A. A. Balandin, J. Appl. Phys. 0021-8979 10.1063/1.1868876 97, 073710 (2005); M. Shamsa, W. L. Liu A A. Balandin, and J. Liu, Appl. Phys. Lett. 87, 202105 (2005).
- (2004) Appl. Phys. Lett. , vol.85 , pp. 5230
- Liu, W.L.¹ Balandin, A.A.² Liu, W.L.³ Balandin, A.A.⁴ Shamsa, M.⁵ Liu, W.L.⁶ Balandin, A.A.⁷ Liu, J.⁸

24
- 0035308581
- K. B. K. Teo, S. E. Rodil, J. T. H. Tsai, A. C. Ferrari, J. Robertson, and W. I. Milne, J. Appl. Phys. 89, 3706 (2001).
- (2001) J. Appl. Phys. , vol.89 , pp. 3706
- Teo, K.B.K.¹ Rodil, S.E.² Tsai, J.T.H.³ Ferrari, A.C.⁴ Robertson, J.⁵ Milne, W.I.⁶

25
- 85174987606
- See for example.
- See for example, http://www.fao.org/docrep/006/y5013e/y5013e08.htm.

26
- 0038497618
- edited by H. S. Nalwa, (ASP, Los Angeles)
- A. A. Balandin, Encyclopedia of Nanoscience and Nanotechnology, edited by, H. S. Nalwa, (ASP, Los Angeles, 2004), pp. 425-445.
- (2004) Encyclopedia of Nanoscience and Nanotechnology , pp. 425-445
- Balandin, A.A.¹

27
- 0347949958
- 0031-9007 10.1103/PhysRevLett.91.226104, ();, Science 309, 1545 (2005).
- C. Casiraghi, A. C. Ferrari, R. Ohr, D. P. Chu, and J. Robertson, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.91.226104 91, 226104 (2003); M. Moseler, P. Gumbsch, C. Casiraghi, A. C. Ferrari, and J. Robertson, Science 309, 1545 (2005).
- (2003) Phys. Rev. Lett. , vol.91 , pp. 226104
- Casiraghi, C.¹ Ferrari, A.C.² Ohr, R.³ Chu, D.P.⁴ Robertson, J.⁵ Moseler, M.⁶ Gumbsch, P.⁷ Casiraghi, C.⁸ Ferrari, A.C.⁹ Robertson, J.¹⁰

28
- 0011683409
- P. L. Kapitza, J. Phys. (Moscow) 4, 181 (1941).
- (1941) J. Phys. (Moscow) , vol.4 , pp. 181
- Kapitza, P.L.¹

29
- 51149220754
- E. T. Swartz and R. O. Pohl, Rev. Mod. Phys. 61, 605 (1989).
- (1989) Rev. Mod. Phys. , vol.61 , pp. 605
- Swartz, E.T.¹ Pohl, R.O.²

30
- 10444284451
- K. Filippov and A. A. Balandin, MRS Internet J. Nitride Semicond. Res. 8, 4 (2003).
- (2003) MRS Internet J. Nitride Semicond. Res. , vol.8 , pp. 4
- Filippov, K.¹ Balandin, A.A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.