Thermal-creep-driven flows in Knudsen compressors and related nano/ microscale gas transport channels

Journal of Microelectromechanical Systems

Volumn 17, Issue 4, 2008, Pages 984-997

  Han, Yen Lin ^a  

^a University of Southern California   (United States)

Author keywords

Knudsen Compressor; Micro devices; Micro pumps; Nano micro transport; Thermal creep

Indexed keywords

COMPRESSORS; CREEP; FLOW OF FLUIDS; GASES; MONTE CARLO METHODS; STAGES;

COMPRESSOR STAGE; DIRECT SIMULATION MONTE CARLO; EXPERIMENTAL STUDIES; FLOW CONDITIONING; GAS TRANSPORTS; INITIAL TEMPERATURE; KNUDSEN; KNUDSEN COMPRESSOR; KNUDSEN COMPRESSORS; KNUDSEN NUMBERS; LOW PRESSURES; MAXIMUM PRESSURE; MESO-SCALE; MICRO DEVICES; MICRO PUMPS; MICRO SCALES; MOVING PARTS; NANO/MICRO TRANSPORT; NEGATIVE IMPACTS; PERFORMANCE LOSSES; RAREFIED FLOW; SINGLE-STAGE; THERMAL CREEP; WORKING GAS;

COMPRESSIBILITY OF GASES;

EID: 49149127506     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.927181     Document Type: Article

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