Microscale vacuum pumps

MEMS: Applications

Volumn , Issue , 2005, Pages 8-1-8-29

  Muntz, E Phillip ^a   Young, Marcus ^a   Vargo, Stephen E ^b  

^a University of Southern California   (United States)

^b Siimpel Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85056982890     PISSN: None     EISSN: None     Source Type: Book    
DOI: None     Document Type: Chapter

References (69)

1. Aoki, K., Sone, Y., Takata, S., Takahashi, K., and Bird, G.A. (2000) “One-way Flow of a Rarefied Gas Induced in a Circular Pipe with a Periodic Temperature Distribution,” Proceedings of the 22nd Rarefied Gas Dynamics Symposium, G.A. Bird, T.J. Bartel, M.A. Gallis, eds., AIP July 9-14, Sydney, Australia, to be published.
2. Baker, B.G., Hobson, J.P., and Pye, A.W. (1973) “Further Measurements of Physical Factors Influencing Accommodation Pumps,” J. Vac. Sci. Technol., 10(1), pp. 241-245.
3. Baum, H. (1957) Vakuum-Technick 7, pp. 154-159.
4. Bernhardt, K.H. (1983) “Calculation of the Pumping Speed of Turbomolecular Vacuum Pumps by Means of Simple Mechanical Data,” J. Vac. Sci. Technol. A, 1(2), pp. 136-139.
5. Bird, G.A. (1998) Molecular Gas Dynamics and the Direct Simulation of Gas Flows, Clarendon Press, Oxford, United Kingdom.
6. Bills, D.G. (1967) “Electrostatic Getter-Ion-Pump design,” J. Vac. Sci. Technol., 4(4), pp. 149-155.
7. Cabuz, C., Herb, W.R., Cabuz, E.I., and Son Thai Lu (2001) “The Dual Diaphragm Pump,” Presented at the 14th IEEE International Conference on Micro Electro Mechanical Systems, Interlaken, Switzerland.
8. Callas, J.L. (1999) “Vacuum System Requirements for a Miniature Scanning Electron Microscope,” in NASA/JPL Miniature Vacuum Pumps Workshop, Glendale, California, JPL website http://cissr.jpl. nasa.gov/pumpsworkshop/.
9. Cercignani, C. (2000) Rarefied Gas Dynamics, Cambridge University Press, Cambridge, United Kingdom.
10. Chang, T.H.P., Kern, D.P., and McCord, M.A. (1989) “Electron Optical Performance of a Scanning Tunneling Microscope Controlled Field Emission Microlens System,” J. Vac. Sci. Technol. B, 7, pp. 1855-1861.
11. Chang, T.H.P., Kern, D.P., and Muray L.P. (1990) “Microminiaturization of Electron Optical Systems,” J. Vac. Sci. Technol. B, 8, pp. 1698-1705.
12. Denison, D.R. (1967) “Performance of a New Electrostatic Getter-Ion Pump,” J. Vac. Sci. Technol., 4(4), pp. 156-162.
13. Doetsch, I.H., and Ryce, S.A. (1972) “Separation of Gas Mixtures by Accommodation Pumping,” Can. J. Chem., 50(7), pp. 957-960.
14. Douglas, R.A. (1965) “Orbitron Vacuum Pump,” Rev. Sci. Instrum., 36(1), pp. 1-6.
15. Dushman, S. (1949) Scientific Foundations of Vacuum Technique, John Wiley & Sons, New York.
16. Dushman, S., and Lafferty, J.M. (1962) Scientific Foundations of Vacuum Technique, John Wiley & Sons, New York.
17. -2 Torr,” J. Vac. Sci. Technol., 14, pp. 1258-1265.
18. Fréchette, L.G., Stuart, A.J., Breuer, K.S., Ehrich, F.F., Ghodssi, R., Kanna, R., Wang, C.W., Zhong, X., Schmidt, M.A., and Epstein, A.H., (2000) “Demonstration of a Microfabricated High-Speed Turbine Supported on Gas Bearings,” in Solid-State Sensor and Actuator Workshop, pp. 43-47, Hilton Head Island.
19. Freidhoff, C.B., Young, R.M., Sriram, S.S., Braggins, T.T., O’Keefe, T.W., Adam, J.D., Nathanson, H.C., Symms, R.R.A., Tate, T.J., Ahmad, M.M., Taylor, S., and Tunstall, J. (1999) “Chemical Sensing Using Nonoptical Microelectromechanical Systems,” J. Vac. Sci. Technol. A, 17, pp. 2300-2307.
20. Han, Y-L., Young, M., Muntz, E.P., and Shiflett, G. (2004) “Knudsen Compressor Performance at Low Pressures,” Rarefied Gas Dynamics, Capitelli, M., ed., AIP CP 762, pp. 162-167.
21. Hemmerich, J.L. (1988) “Primary Vacuum Pumps for the Fusion Reactor Fuel Cycle,” J. Vac. Sci. Technol. A, 6(1), pp. 144-153.
22. Hobson, J.P. (1970) “Accommodation Pumping - A New Principle for Low Pressure,” J. Vac. Sci. Technol., 7(2), pp. 301-357.
23. Hobson, J.P., and Pye, A.W. (1972) “Physical Factors Influencing Accommodation Pumps,” J. Vac. Sci. Technol., 9(1), pp. 252-256.
24. Hobson, J.P., and Salzman, D.B. (2000) “Review of Pumping by Thermomolecular Pressure,” J. Vac. Sci. Technol. A, 18(4), pp. 1758-1765.
25. Hopfinger, E.J., and Altman, M. (1969) “A Study of Thermal Transpiration for the Development of a New Type of Gas Pump,” J. Eng. Power, Trans. ASME, 91, pp. 207-215.
26. Hudsen, M.L., and Bartel T.J. (1999) “DSMC Simulation of Thermal Transpiration Pumps,” in Rarefied Gas Dynamics 1, R. Brun, R. Campargue, and J.C. Lengrand, eds., pp. 719-726, Cépaduès éditions, Toulouse, France.
27. Knudsen, M. (1910a) “Eine Revision der Gleichgewichtsbedingung der Gase. Thermische Molekularströmung,” Ann. Phys., 31, pp. 205-229.
28. Knudsen, M. (1910b) “Thermischer Molekulardruck der Gase in Röhre,” Ann. Phys., 33, pp. 1435-1448.
29. Lafferty, J.M. (1998) Foundations of Vacuum Science and Technology, John Wiley & Sons, New York.
30. Loyalka, S.K., and Hamoodi, S.A. (1990) “Poiseuille Flow of a Rarefied Gas in a Cylindrical Tube: Solution of Linearized Boltzmann Equation,” Phys. Fluids A, 2(1)1, pp. 2061-2065.
31. Loyalka, S.K., and Hickey, K.A. (1991) “Kinetic Theory of Thermal Transpiration and the Mechanocaloric Effect: Planar Flow of a Rigid Sphere Gas with Arbitrary Accommodation at the Surface,” J. Vac. Sci. Technol. A, 9(1), pp. 158-163.
32. Madou, M. (1997) Fundamentals of Microfabrication, CRC Press, Boca Raton, Florida.
33. Moore, E., Muntz, E.P., Eyre, B.F., Myung, N., Orient, O., Shcheglov, K., and Wiberg, D. (2002) “Performance Analysis for Meso-Scale Scroll Pumps,” Presented at the 2nd NASA/JPL Miniature Pumps Workshop, Pasadena, CA.
34. Moore, E.J., Muntz, E.P., Eyre, B., Myung, N., Orient, O., Shcheglov, K., and Wiberg, D. (2003) “Analysis of a Two Wrap Meso Scale Scroll Pump,” in Rarefied Gas Dynamcis, Ketsdever, A., and Muntz, E.P., eds., AIP Conference Proceedings 663, Melville, N.Y., pp. 1033-1040.
35. Muntz, E.P., Sone, Y., Aoki, K., and Vargo, S. (1998) “Performance Analysis and Optimization Considerations for a Knudsen Compressor in Transitional Flow,” USC Aerospace and Mechanical Engineering Report No. 98001, University of Southern California, Los Angeles.
36. Muntz, E.P. (1999) “Surface Dominated Rarefied Flows and the Potential of Surface Nanomanipulations,” in Rarefied Gas Dynamics 1, R. Brun, R. Campargue and J.C. Lengrand, eds., pp. 3-15, Cépaduès éditions, Toulouse, France.
37. Muntz, E.P., Sone, Y., Aoki, K., Vargo, S., and Young, M. (2002) “Performance Analysis and Optimization for the Knudsen Compressor in Transitional Flow,” J. Vac. Sci. Tech. A, 20(1), Jan/Feb, pp. 214-224.
38. NASA/JPL (1999) NASA/JPL Miniature Vacuum Pumps Workshop, http://cicsr.jpl.gov.
39. Nathanson, H.C., Liberman, I., and Freidhoff, C. (1995) “Novel Functionality Using Micro Gaseous Devices,” in The 8th Annual International Workshop on Micro Electro Mechanical Systems - MEMS '95, pp. 72-76, IEEE, Amsterdam, Netherlands.
40. Orient, O.J., Chutjian, A., and Garkanian, V. (1997) “Miniature, High-Resolution, Quadrupole Mass- Spectrometer Array,” Rev. Sci. Instrum., 68, pp. 1393-1397.
41. Orner, P.A., and Lammers, G.B. (1970) “The Application of Thermal Transpiration to a Gaseous Pump,” J. Basic Eng. Trans. ASME, 92, pp. 294-302.
42. Park, J.-Y., Choi, H.-J., Lee, Y., Kang, S., Chunk, K., Park, S.W., and Kuk, Y. (1997) “Fabrication of Electron- Beam Microcolumn Aligned by Scanning Tunneling Microscope,” J. Vac. Sci. Technol. A, 15, pp. 1499-1502.
43. Pham-Van-Diep, G., Keeley, P., Muntz, E.P., and Weaver, D.P. (1995) “A Micromechanical Knudsen Compressor,” in Proceedings 19th International Symposium on Rarefied Gas Dynamics, J.Harvey and G. Lord, eds., pp. 715-721, Oxford University Press, Oxford, United Kingdom.
44. Piltingsrud, H.V. (1994) “Miniature Cryosporption Vacuum Pump for Portable Instruments,” J. Vac. Sci. Technol. A, 12, pp. 235-240.
45. Piltingsrud, H.V. (1996) “Miniature Peristaltic Vacuum Pump for Use in Portable Instruments,” J.Vac. Sci. Technol. A, 14, pp. 2610-2617.
46. Piltingsrud, H.V. (1997) “A Field Deployable Gas Chromatograph/Mass Spectrometer for Industrial Hygiene Applications,” Am. Ind. Hyg. Assoc. J., 58, pp. 564-577.
47. Sharipov, F., and Seleznev, V. (1998) “Data on Internal Rarefied Gas Flows,” J. Phys. Chem. Ref. Data, 27, pp. 657-706.
48. Short, R.T., Fries, D.P., Toler, S.K., Lembke, C.E., and Byrne, R.H. (1999) “Development of an Underwater Mass-Spectrometry System for In Situ Chemical Analysis,” Meas. Sci. Technol., 10, pp. 1195-1201.
49. Smith, J.N., and Saltzburg, H. (1964) “Recent Studies of Molecular Beam Scattering from Continuously Deposited Gold Films,” in Proceedings 4th International Symposium on Rarefied Gas Dynamics 2, J.H. de Leeuw, ed., pp. 491-504, Academic Press, New York.
50. Sone, Y., and Itakura, E. (1990) “Analysis of Poiseuille and Thermal Transpiration Flows for Arbitrary Knudsen Numbers by a Modified Knudsen Number Expansion Method and Their Database,” J. Vac. Soc. Jpn., 33, pp. 92-94.
51. Sone, Y., and Sugimoto, H. (2003) “Vacuum Pump without Moving Parts and its Performance,” in Rarefied Gas Dynamics, Ketsdever, A., and Muntz, E.P., eds., AIP Conference Proceedings 663, Melville, N.Y., pp. 1041-1048.
52. Sone, Y., Waniguchi, Y., and Aoki, K. (1996) “One-Way Flow of a Rarefied Gas Induced in a Channel with a Periodic Temperature Distribution,” Phys. Fluids, 8, pp. 2227-2235.
53. Sone, Y., and Yamamoto, K. (1968) “Flow of a Rarefied Gas Through a Circular Pipe,” Phys. Fluids, 11, pp. 1672-1678.
54. Suetsugu, Y. (1993) “Numerical Calculation of an Ion Pump’s Pumping Speed,” Vacuum, 46(2), pp. 105-111.
55. Terry, S.C., Jerman, J.H., and Angell, J.B. (1979) “A Gas Chromatographic Air Analyzer Fabricated on a Silicon Wafer,” IEEE Transactions on Electron. Devices, ED-26, pp. 1880-1886.
56. Tracy, D.H. (1974) “Thermomolecular Pumping Effect,” J. Phys. E: Sci. Instrum., 7, pp. 533-563.
57. Turner, D.J. (1966) “A Mathematical Analysis of a Thermal Transpiration Vacuum Pump,” Vacuum, 16, pp. 413-419.
58. Vargo, S.E. (2000) The Development of the MEMS Knudsen Compressor as a Low Power Vacuum Pump for Portable and In Situ Instruments, Ph.D. Thesis, University of Southern California, Los Angeles, California.
59. Vargo, S.E., Muntz, E.P., Shiflett, G.R., and Tang, W.C. (1999) “The Knudsen Compressor as a Micro and Macroscale Vacuum Pump Without Moving Parts or Fluids,” J.Vac. Sci. Technol. A, 17, pp. 2308-2313.
60. Vargo, S.E., and Muntz, E.P. (1996) “An Evaluation of a Multi-Stage Micromechanical Knudsen Compressor and Vacuum Pump,” in Proceedings 20th International Symposium on Rarefied Gas Dynamics, C. Shen, ed., pp. 995-1000, Peking University Press, Beijing, China.
61. Vargo, S.E., and Muntz, E.P. (1998) “Comparison of Experiment and Prediction for Transitional Flow in a Single Stage Micromechanical Knudsen Compressor,” in Proceedings 21st International Symposium on Rarefied Gas Dynamics, R. Brun, R. Campargue and J.C. Lengrand, eds., pp. 711-718, Cépaduès éditions, Marseille, France.
62. White, A.J., Blamire, M.G., Corlette, C.A., Griffiths, B.W., Martin, D.M., Spencer, S.B., and Mullock, S.J. (1998) “Development of a Portable Time-of-Flight Membrane Inlet Mass Spectrometer for Environmental Analysis,” Rev. Sci. Instrum., 69, pp. 565-571.
63. Wiberg, D., Scheglov, K., White, V., Orient, O., and Chutjian, A. (2000) “Toward a Micro Gas Chromatograph/Mass Spectrometer (GC/MS) System,” presented at the 3rd Annual International Conference on Integrated Nano/Microtechnology for Space Applications, Houston, TX.
64. Wilcox, J.Z., Feldman, J., George, T., Wilcox, M., and Sherer, A. (1999) “Miniaturization of High Vacuum Pumps: Ring-Anode Orbitron,” presented at AVS 46th International Symposium, Seattle, Washington, Oct. 25-29.
65. Young, M., Han, Y-L., Muntz, E.P., and Shiflett, G. (2003) “Characteristics of a Radiantly Driven Multi-Stage Knudsen Compressor,” IMECE2003-41486.
66. Young, M., Han, Y-L., Muntz, E.P., and Shiflett, G. (2004) “Characterization and Optimization of a Radiantly Driven Multi-Stage Knudsen Compressor,” Rarefied Gas Dynamics, Capitelli, M., ed., AIP CP 762, pp. 174-179.
67. Young, M., Vargo, S.E., Shiflett, G., Muntz, E.P., and Green, A. (2001) “The Knudsen Compressor as an Energy Efficient Micro-Scale Vacuum Pump,” the 2001 ASME International Mechanical Engineering Congress and Exposition (IMECE2001), New York.
68. Young, M. (2004) Investigation of Several Important Phenomena Associated with the Development of Knudsen Compressors, Ph.D. Thesis, University of Southern California, Los Angeles.
69. Young, R.M. (1999) “Analysis of a Micromachine Based Vacuum Pump on a Chip Actuated by the Thermal Transpiration Effect,” J. Vac. Sci. Technol. B, 17, pp. 280-287.