Experimental investigation of micro-mesoscale Knudsen compressor performance at low pressures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 3, 2007, Pages 703-714

  Han, Y L ^a   Muntz, E P ^a  

^a University of Southern California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AEROGELS; COMPUTER SIMULATION; MACHINING; RADIANT HEATING; THERMAL GRADIENTS;

KNUDSEN COMPRESSOR; MESOSCALE GAS PUMP; RAREFIELD FLOW; THERMAL CREEP;

COMPRESSORS;

EID: 34249867926     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2723755     Document Type: Article

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