Vacuum pump without a moving part driven by thermal edge flow

AIP Conference Proceedings

Volumn 762, Issue , 2005, Pages 168-173

  Sugimoto, Hiroshi ^a   Sone, Yoshio ^b  

^a KYOTO UNIVERSITY   (Japan)

^b NONE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33749008994     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.1941531     Document Type: Conference Paper

References (5)

1. Y. Sone and H. Sugimoto, J. Vac. Soc. Jpn. 45, 138-141 (2002).
2. Y. Sone and H. Sugimoto, "Vacuum Pump without a Moving Part and its Performance" in Rarefied Gas Dynamics, edited by A. D. Ketsdever and E. P. Muntz, AIP Conference Proceedings 663, Melville, New York, 2003, pp. 1041-1049.
3. Y. Sone and M. Yoshimoto, Phys. Fluids 9, 3530-3534 (1997).
4. Y. Sone, Kinetic Theory and Fluid Dynamics, Birkhäuser, Boston, 2002.
5. Y. Sone, Molecular Gas Dynamics, Birkhäuser, Boston, 2005.