Broad range adjustable emission of stacked SiNx/SiOy layers

Journal of Materials Research

Volumn 23, Issue 6, 2008, Pages 1513-1516

  Barreto, Jorge ^a   Peralvarez M ^b   Morales, A ^a   Garrido, B ^b   Montserrat, J ^a   Dominguez C ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ION BOMBARDMENT; ION IMPLANTATION; LIGHT EMISSION; LIGHT SOURCES; LUMINESCENCE; NITRIDES; NONMETALS; OPTICAL DESIGN; SILICON; SILICON NITRIDE;

BLUE LUMINESCENCE; EMISSION PROPERTIES; MATERIALS RESEARCH SOCIETY (MRS); NITRIDE LAYERS; RED LUMINESCENCE; SI-BASED; STACKED LAYERS; VISIBLE SPECTRUM (VIS);

EMISSION SPECTROSCOPY;

EID: 48949117378     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2008.0189     Document Type: Article

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