A resonant micromachined electrostatic charge sensor

IEEE Sensors Journal

Volumn 8, Issue 9, 2008, Pages 1499-1505

  Zhu, Yong ^a   Lee, Joshua E Y ^a   Seshia, Ashwin A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Electrostatic charge sensor; Micromechanical resonator; Transcapacitance amplifier (TCA); Variable capacitor; Vibrating reed electrometer

Indexed keywords

CAPACITANCE; CAPACITORS; DIELECTRIC DEVICES; ELECTRIC EQUIPMENT; ELECTROMETERS; ELECTROSTATICS; ENERGY STORAGE; LEAKAGE CURRENTS; MICROMACHINING; OPTICAL DESIGN; SENSORS; SIGNAL TO NOISE RATIO; STANDARDS;

AC VOLTAGE; CHARGE NOISE; ELECTROSTATIC CHARGE; ELECTROSTATIC CHARGE SENSOR; LONG-TERM STABILITY; MICROMACHINED; MICROMACHINING PROCESSING; MICROMECHANICAL RESONATOR; ROOM TEMPERATURES; SENSOR ELECTRONICS; TRANSCAPACITANCE AMPLIFIER (TCA); VARIABLE CAPACITOR; VARIABLE CAPACITORS; VIBRATING REED ELECTROMETER; VOLTAGE CONVERSION GAIN;

ELECTRIC CURRENTS;

EID: 48849106785     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2008.923597     Document Type: Article

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