Ultra-high accuracy thermal expansion measurements with PTB's precision interferometer

Measurement Science and Technology

Volumn 19, Issue 8, 2008, Pages

  Schodel R ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Gauge blocks; Interferometry; Nanometer; Traceability; Uncertainty

Indexed keywords

EXPANSION; EXTREME ULTRAVIOLET LITHOGRAPHY; GAGE BLOCKS; INTERFEROMETERS; INTERFEROMETRY; PHOTOLITHOGRAPHY; UNCERTAINTY ANALYSIS;

GAUGE BLOCK; NANOMETER; PHASE-STEPPING INTERFEROMETRY; TEMPERATURE-DEPENDENT EFFECTS; THERMAL EXPANSION MEASUREMENTS; THERMAL EXPANSION PROPERTIES; TRACEABILITY; UNCERTAINTY;

THERMAL EXPANSION;

EID: 48849098911     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/19/8/084003     Document Type: Article

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