Accurate extraction of thermal expansion coefficients and their uncertainties from high precision interferometric length measurements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5879, Issue , 2005, Pages 1-11

  Schodel R ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Absolute length measurements; Expansivity; Interferometer; Thermal expansion

Indexed keywords

ABSOLUTE LENGTH MEASUREMENTS; EXPANSIVITY;

APPROXIMATION THEORY; FUNCTIONS; INTERFEROMETERS; NANOTECHNOLOGY; POLYNOMIALS;

THERMAL EXPANSION;

EID: 29244447769     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.616923     Document Type: Conference Paper

References (6)

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2. R. Schödel, G. Bönsch, Highest accuracy interferometer alignment by retroreflection scanning, Applied Optics 43, 5738-5743 (2004).
3. J. E. Decker, R. Schödel and G. Bönsch. Considerations for the evaluation of measurement uncertainty in interferometric gauge block calibration applying methods of phase step interferometry. Metrologia 41:L11-L17 (2004).
4. R. Schödel, A. Nicolaus and G. Bönsch. Minimizing interferometer misalignment errors for measurement of subnanometer length changes. In Recent Developments in Traceable Dimensional Measurements II, Decker, Brown, eds., Proc. SPIE 5190:34-42 (2003).
5. J.D. James, J. A. Spittle, S.G.R. Brown and R.W. Evans. A review of measurement techniques for the thermal expansion coefficient of metals and alloys at elevated temperatures. Meas. Sci. Technol. 12, R1-R15 (2001)
6. R. Schödel and G. Bönsch. Precise interferometric measurements at single crystal silicon yielding thermal expansion coefficients from 12°C to 28°C and compressibility. Proc. SPIE 4410:54-62 (2001).