A new micro artefact for testing of optical and tactile sensors

EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology

Volumn , Issue , 2005, Pages 201-204

  Neugebauer, M ^a   Neuschaefer Rube, U ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

GEOMETRY;

COMPARISON MEASUREMENT; COMPLEX GEOMETRIES; MEASURING SYSTEMS; TACTILE SENSORS;

PRECISION ENGINEERING;

EID: 36248971207     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. Scherer S, Anderson E: New Analytical Capabilities in Drug Discovery - Digital 3-D Microscopy. Buisiness Briefing: Future Drug Discovery 2004
2. Dai G, Pohlenz F, Danzebrink H-U, Xu M, Hasche K, Wilkening G: Metrological large range scanning probe microscope. Rev. Sci. Instrum., Vol. 75, 4 (2004), 962-969
3. Neugebauer M, Franke M, Jusko O, Krystek M, Neuschaefer-Rube U, Wäldele F: Artifacts and Test Procedures for Contour Measuring Instruments. Proceedings of the XI. International Colloquium on Surfaces-Part II, Aachen: Shaker, 2004, 102-107