Artefacts with rough surfaces for verification of optical microsensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6616, Issue PART 1, 2007, Pages

  Ehrig, Wiebke ^a   Neuschaefer Rube, Ulrich ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Artefact; Coordinate metrology; Optical metrology; Rough surfaces

Indexed keywords

INTERFEROMETRY; LIGHT SCATTERING; MEASUREMENT THEORY; SURFACE ROUGHNESS;

ARTEFACT SURFACES; OPTICAL MICROSENSORS; OPTICAL SCATTERING; PHYSIKALISCH-TECHNISCHE BUNDESANSTALT (PTB); TACTILE PROBING;

OPTICAL SENSORS;

EID: 36248974736     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.725976     Document Type: Conference Paper

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