Photoluminescence from Si-implanted Si3 N4 films

Radiation Measurements

Volumn 43, Issue SUPPL.1, 2008, Pages

  Lu Y Y ^a   Liu, C L ^a,b   Yin, L J ^a   Wang, Z ^a   Zhang, X D ^a  

^a TIANJIN UNIVERSITY   (China)

^b Institute of Advanced Materials Physics Faculty of Science   (China)

Author keywords

Electron spin resonance; Photoluminescence; Si ion implantation; Si3 N4 layer; Silicon nano clusters

Indexed keywords

SILICON;

EID: 48549086456     PISSN: 13504487     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.radmeas.2008.04.039     Document Type: Article

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