Progress in integrated gyroscopes

Record - IEEE PLANS, Position Location and Navigation Symposium

Volumn , Issue , 2004, Pages 1-6

  Geen, John A ^a  

^a ANALOG DEVICES INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; CERAMIC MATERIALS; GLOBAL POSITIONING SYSTEM; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RESONATORS; VIBRATIONS (MECHANICAL);

CERAMIC PACKAGES; INTEGRATED GYROSCOPES; NOISE IMMUNITY; VEHICLE DYNAMIC CONTROL (VDC);

GYROSCOPES;

EID: 2942635297     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. A.Kouropenis et al., "Performance of MEMS Inertial Sensors", IEEE PLANS 1998.
2. R.Hulsing, "MEMS Inertial Rate and Acceleration Sensor", IEEE PLANS 1998.
3. N.Faulkner et al., "Integrated MEMS/GPS Navigation Systems", IEEE PLANS 1998.
4. H.Xie et al., J.MEMS, Vol.11, No.2, 2002, pp.93-101.
5. G.Yan et.al., "Integrated Bulk-Micromachined Gyroscope Using Deep Trench Isolation Technology", Maastricht IEEE MEMS 2004, Technical Digest pp 605-608.
6. J.Geen, "A Path to Low Cost Gyroscopy", Solid State Sensor and Actuator Workshop, Hilton Head, 1998, Technical Digest pp 51-54.
7. J.Geen et al., J. Solid State Circuits, Vol. 37, No. 12, 2002, pp. 1860-1866
8. S.Lewis et al., "Integrated Sensor and Electronics Processing for >10^8 "iMEMS" Inertial Measurement Unit Components" Technical Digest of the International Electron Devices Meeting, 2003 pp. 949-952
9. J.Geen & D.Carow, US Patent 6,122,961, Sep.26, 2000.
10. J.Geen, US Patent 5,635,640, Jun.3, 1997.