A 10 μm thick poly-SiGe gyroscope processed above 0.35 μ CMOS

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 39-42

  Scheurle, A ^a   Fuchs, T ^a   Kehr, K ^a   Leinenbach, C ^a   Kronmuller S ^a   Arias, A ^b   Ceballos, J ^b   Lagos, M A ^b   Mora, J M ^b   Munoz J M ^b   Ragel, A ^b   Ramos, J ^b   Van Aerde, S ^c   Spengler, J ^d   Mehta, A ^e   Verbist, A ^e   Du Bois, B ^e   Witvrouw, A ^e  

^a ROBERT BOSCH GMBH   (Germany)

^b INSTITUTO DE MICROELECTRÓNICA DE SEVILLA   (Spain)

^c ASM   (Belgium)

^d PHILIPS RESEARCH LABORATORIES   (Germany)

^e IMEC   (Belgium)

Author keywords

CMOS; Gyroscope; Monolithic integration; SiGe; Silicon germanium

Indexed keywords

COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MONOLITHIC INTEGRATED CIRCUITS; POLYSILICON;

CMOS; GYROSCOPE; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; MONOLITHIC INTEGRATION; MONOLITHICALLY INTEGRATED; POLY-SIGE; SIGE; SILICON-GERMANIUM;

REACTIVE ION ETCHING;

EID: 52149101191     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. A. Mehta, M. Gromova, P. Czarnecki, K. Baert, A. Witvrouw, "Optimisation of PECVD poly-SiGe layers for MEMS post-processing on top of CMOS" Proc. Transducers 2005, Vol.2, pp. 1326-1329, 2005.
2. A. Witvrouw et al., "Processing of MEMS gyroscopes on top of CMOS ICs" Proc. ISSCC 2005, p 88-89 (2005).
3. C. Rusu et al., "New low-stress PECVD poly-SiGe Layers for MEMS" J. MEMS, Vol. 12 (6), pp. 816-825, 2003.
4. J. A. Geen, S. J. Sherman, J. F. Chang, S. R. Lewis "Single-Chip Surface Micromachined Integrated Gyroscope with 50°/hour Root Allan Variance", IEEE Journal of Solid-State Circuits, vol. 37, No. 12, December 2002
5. F. V. Fernández, R. del Río, R. Castro-López, O. Guerra, F. Medeiro, B. Pérez-Verdú, "CMOS Telecom Data-Converters", Chapter 15, Kluwer Academic Publishers, 2003