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Volumn 17, Issue 7-10, 2008, Pages 1625-1628
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Control over the sp2/sp3 ratio by tuning plasma parameters of the Thermoionic Vacuum Arc
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Author keywords
Diamond like carbon; High resolution electron microscopy; Nanostructures
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Indexed keywords
CAVITY RESONATORS;
COMPLEXATION;
ELECTRON BEAMS;
ELECTRON GUNS;
ELECTRON TUBES;
HYDROGEN;
NONMETALS;
PLASMA DEPOSITION;
THICK FILMS;
VACUUM;
VACUUM APPLICATIONS;
VACUUM TECHNOLOGY;
DEPOSITION METHODS;
DIAMOND LIKE CARBON;
DLC FILMS;
ELECTRON GUN SYSTEM;
HIGH-RESOLUTION ELECTRON MICROSCOPY;
NANOSTRUCTURES;
SOLID PRECURSORS;
THIN FILMS;
VACUUM ARCS;
VACUUM DEPOSITION;
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EID: 48249139788
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2008.02.032 Document Type: Article |
Times cited : (39)
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References (27)
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