Voltage-tunable piezoelectrically-transduced single-crystal silicon resonators on SOI substrate

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 149-152

  Piazza, Gianluca ^a   Abdolvand, Reza ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FREQUENCIES; RESONANCE; SILICON; SILICON WAFERS; SINGLE CRYSTALS; SUBSTRATES; THRESHOLD VOLTAGE; TUNING;

CAPACITIVE FINE TUNING; CLAMPED CLAMPED BEAM RESONATOR; HIGH Q SINGLE CRYSTAL SILICON; PIEZOELECTRIC TRANSDUCTION; SINGLE CRYSTAL SILICON RESONATORS; VOLTAGE TUNABLE CENTER FREQUENCIES;

CRYSTAL RESONATORS;

EID: 0038494584     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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