Plasma enhanced chemical vapour deposition of silica onto titanium: Analysis of surface chemistry, morphology and hydroxylation

Surface Science

Volumn 602, Issue 14, 2008, Pages 2402-2411

  Szili, Endre J ^a   Kumar, Sunil ^b   Smart, Roger St C ^b   Lowe, Rachel ^a   Saiz, Eduardo ^c   Voelcker, Nicolas H ^a  

^a FLINDERS UNIVERSITY   (Australia)

^b UNIVERSITY OF SOUTH AUSTRALIA   (Australia)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Biomaterial; Hydroxyl groups; Plasma enhanced chemical vapour deposition; Silica films; Titanium

Indexed keywords

CHEMICAL REACTIONS; CORROSION RESISTANCE; HEALTH; METALS; PAINTING; PLASMA DEPOSITION; PLASMAS; SILICA; SILICATE MINERALS; SILICON COMPOUNDS; SURFACE CHEMISTRY; TITANIUM;

(1 1 0) SURFACE; BIOACTIVE COATINGS; CHEMICAL VAPOUR DEPOSITION; HIGH QUALITY (HQ); METALLIC IMPLANTS; SILICA COATINGS; SILICA FILMS; TETRA ETHOXY SILANE (TEOS);

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 48149098767     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2008.05.027     Document Type: Article

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