Fabrication and properties of high-Q AlN/SiO2 composite TFBAR's for above IC oscillators

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 1164-1167

  Artieda, A ^a   Muralt, P ^a  

^a Ceramics Laboratory Ecole Polytechnique Federale de Lausanne   (Switzerland)

Author keywords

Aluminium nitride; Q factor; RF MEMS; TCF; TFBAR

Indexed keywords

ACOUSTICS; OPTICAL DESIGN; SILICON COMPOUNDS; ULTRASONICS;

ALUMINIUM NITRIDE; BULK ACOUSTIC WAVE; COMPOSITE RESONATORS; LAYER SEQUENCE; Q FACTOR; RF MEMS; TCF; TFBAR;

ACOUSTIC RESONATORS;

EID: 48149097521     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.294     Document Type: Conference Paper

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