Effects of atmosphere on the reliability of RF-MEMS capacitive switches

European Microwave Week 2007 Conference Proceedings, EuMW 2007 - 2nd European Microwave Integrated Circuits Conference, EuMIC 2007

Volumn , Issue , 2007, Pages 548-550

  Blondy, Pierre ^a   Crunteanu, Aurelian ^a   Pothier, Arnaud ^a   Tristant, Pascal ^a   Catherinot, Alain ^a   Champeaux, Corinne ^a  

^a UNIVERSITY OF LIMOGES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT ATMOSPHERE; CAPACITIVE SWITCHING; CHARGING MECHANISMS; DRY ENVIRONMENT; EUROPEAN; MEMS SWITCHES; RF-MEMS; RF-MEMS SWITCHES; SURFACE CHARGING;

COMPOSITE MICROMECHANICS; ELECTRIC CHARGE; ELECTRIC SWITCHES; ELECTRONICS INDUSTRY; MECHANISMS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVE CIRCUITS; MICROWAVE INTEGRATED CIRCUITS; MICROWAVES; SULFATE MINERALS;

INTEGRATED CIRCUITS;

EID: 48149085137     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EMICC.2007.4412771     Document Type: Conference Paper

References (8)

1. C. Goldsmith, Z. Yao, S. Eshelman, and D. Denniston, "Performance of low-loss RF MEMS capacitive switches," IEEE Microwave Guided Wave Lett., vol. 8, no. 8, pp. 269-271, Aug. 1998.
2. C. Goldsmith, J. Ehmke, A. Malczewski, B. Pillans, S. Eshelman, Z. Yao, J. Brank, and M. Eberly, "Lifetime characterization of capacitive RF MEMS switches," IEEE MTT-S Int. Microwave Symp. Dig., pp. 227-230, June 2001.
3. W. M. van Spengen, R. Puers, R. Mertens, and I. De Wolf, "A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches," J. Micromech. Microeng., vol. 14, pp. 514-521, Jan. 2004.
4. X. Yuan, J. C. M. Hwang, D. Forehand, and C. L. Goldsmith, "Modeling and characterization of dielectric-charging effects in RF MEMS capacitive switches," IEEE MTT-S Int. Microwave Symp. Dig., pp. 753-756, June 2005.
5. S. Melle, D. De Conto, L. Mazenq, D. Dubuc, K. Grenier, L. Bary, O. Vendier, J.L. Cazaux, and R. Plana, "Modeling of the dielectric charging kinetic for capacitives RF-MEMS," IEEE MTT-S Int. Microwave Symp. Dig., pp. 757-760, June 2005.
6. G. J. Papaioannou, M. Exarchos, V. Theonas, G. Wang, and J. Papapolymerou, "Temperature study of the dielectric polarization effects of capacitive RF-MEMS switches," IEEE Trans. Microwave Theory Techniques, vol. 53, pp. 3467-3473, Nov. 2005.
7. G. M. Rebeiz, "RF MEMS Theory, Design, and Technology", J. Wiley & Sons, 2003.
8. Zhen Peng, Xiaobin Yuan, James C. M. Hwang, David Forehand and Charles L. Goldsmith, "Top vs. Bottom Charging of the Dielectric in RF MEMS Capacitive Switches," IEEE Asia Pacific Microwave Conference, Dec. 2006