Design and optimisation of electrostatic micromotors

IEEE International Symposium on Industrial Electronics

Volumn , Issue , 1993, Pages 638-643

  Johansson, T B ^a   Van Dessel, M ^a   Belmans, R ^a   Geysen, W ^a   Hanitsch, R ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; EQUIVALENT CIRCUITS; INDUSTRIAL ELECTRONICS; MESH GENERATION;

AVERAGE TORQUES; ELECTROSTATIC MICROMOTORS; OPTIMISATIONS;

MICROMOTORS;

EID: 77950593799     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISIE.1993.268730     Document Type: Conference Paper

References (4)

1. Fan, L.S.; Tai, Y.-C; Muller, R.S. "IC-processed electrostatic micromotors". Sensors and Actuators, Vol. 20 (1989), NOS 1 & 2, p 41-48.
2. Tai, Y.-C; Muller, RS. "IC-processed electrostatic synchronous miCTomotors." Sensors and Actuators, Vol. 20 (1989), NOS 1 & 2, p. 49-56.
3. U.Wallrabe, P.Bley, B.Krevet, W.Menz, J.Mohr "Theoretical and experimental results of an electrostatic micromotor with large gear ratio fabricated by the LIGA process" MEMS 1992 Travemünde, Germany.
4. Infolytica Corp. "MagNet Users Manual version 5.0", Montreal, Canada, 1992