Coupled Electrostatic and Mechanical FEA of a Micromotor

Journal of Microelectromechanical Systems

Volumn 3, Issue 4, 1994, Pages 162-171

  Ziad, H ^b   Milne, N G ^a   Yang, S J ^a   Sangster, A J ^a  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

^b Heriot Watt University ^*  (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; FINITE ELEMENT METHOD; GEOMETRY; ITERATIVE METHODS; LOADS (FORCES); MATHEMATICAL MODELS; ROTORS; SCANNING ELECTRON MICROSCOPY; STATORS; THREE DIMENSIONAL;

ROTOR DEFLECTIONS; VARIABLE CAPACITANCE MICROMOTOR (VCM);

PRINTED CIRCUIT MOTORS;

EID: 0028730839     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.338637     Document Type: Article

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