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Volumn 381-382, Issue , 2008, Pages 517-520

Measurement and characterization of surface quality in fast tool servo machining of optical microstructures

Author keywords

Fast tool servo machining; Optical microstructures; Power spectrum analysis; Surface characterization; Surface generation

Indexed keywords

MICROLENSES; MICROSTRUCTURE; POWER SPECTRUM; SPECTRUM ANALYSIS; SURFACE PROPERTIES; SURFACE ROUGHNESS;

EID: 47049109053     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/kem.381-382.517     Document Type: Conference Paper
Times cited : (1)

References (11)
  • 3
    • 0031269831 scopus 로고    scopus 로고
    • Arraytest for Microlenses
    • Schwider, J. and Sickinger, Arraytest for Microlenses, Optik, Vol. 107 (1997), p.26-34.
    • (1997) Optik , vol.107 , pp. 26-34
    • Schwider, J.1    Sickinger2
  • 7
    • 85076738493 scopus 로고    scopus 로고
    • Daly, D.J., Hutley, M.C. and Stevens, R.F., in Interferometery '94: New Techniques and Analysis in Optical Measurements, M. Kujawinska and K. Patorski, eds., Proceedings of SPIE 2340 (1994), pp. 258-263.
    • Daly, D.J., Hutley, M.C. and Stevens, R.F., in Interferometery '94: New Techniques and Analysis in Optical Measurements, M. Kujawinska and K. Patorski, eds., Proceedings of SPIE 2340 (1994), pp. 258-263.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.