Wavefront aberration measurement technology for microlens using the Mach-Zehnder interferometer provided with a projected aperture

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5532, Issue , 2004, Pages 117-127

  Miyashita, Takaaki ^a   Hamanaka, Kenjiro ^b   Kato, Masahiko ^c   Ishihara, Satoshi ^d   Sato, Hiroyasu ^e   Sato, Eiichi ^e   Morokuma, Tadashi ^f  

^a RICOH COMPANY LTD   (Japan)

^b NIPPON SHEET GLASS CO LTD   (Japan)

^c Oitda ^*  (Japan)

^d OITDA   (Japan)

^e Opto Design Inc   (Japan)

^f TOKAI UNIVERSITY   (Japan)

Author keywords

Effective aperture; Interferometer; Interforometry; Mach Zehnder; Microlens; Microlens array; Projection aperture; Wavefront aberration

Indexed keywords

DIFFRACTION; INTERFEROMETERS; INTERFEROMETRY; MICROLENSES; OPTICAL DEVICES; PHASE SHIFT;

EFFECTIVE APERTURE; MACH-ZEHNDER INTERFEROMETER; MICROLENS ARRAYS; WAVEFRONT ABERRATION;

ABERRATIONS;

EID: 15744368304     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.559872     Document Type: Conference Paper

References (6)

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6. th annual meeting, 5514-14, 2004