Use of ultrasonic cavitation in surface cleaning: A mathematical model to relate cleaning efficiency and surface erosion rate

Journal of the IEST

Volumn 49, Issue 2, 2006, Pages 40-50

  Nagarajan, Ramamurthy ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

Author keywords

Acoustic streaming; Cavitation erosion; Defect reduction; Particle removal; Ultrasonic cleaning; Yield improvement

Indexed keywords

ACOUSTIC FIELDS; ACOUSTIC STREAMING; CAVITATION; CAVITATION CORROSION; EFFICIENCY; EROSION; HARD DISK STORAGE; PARTICLE SIZE; SHOCK WAVES; SURFACE CLEANING; ULTRASONIC CLEANING;

CLEANING EFFICIENCY; DEFECT REDUCTION; PARTICLE REMOVAL; SEMICONDUCTOR WAFER FABRICATION; SUB-MICRON PARTICLES; SURFACE EROSION RATE; ULTRASONIC CAVITATION; YIELD IMPROVEMENT;

CLEANING;

EID: 47049090028     PISSN: 10984321     EISSN: None     Source Type: Journal    
DOI: 10.17764/jiet.49.2.t654225w78220764     Document Type: Article

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