Pyroelectric LiTaO3 thin films elaborated by RF magnetron sputtering on RuO2/SiNx

Ferroelectrics

Volumn 353, Issue 1 PART 3, 2007, Pages 233-241

  Combette, Philippe ^a   Nougaret, Laurianne ^a   Sorli, Brice ^a   Pascal Delannoy, Frédérique ^a  

^a UNIVERSITÉ MONTPELLIER II   (France)

Author keywords

Lithium tantalate; Pyroelectric; Sputtering; Thin films

Indexed keywords

LITHIUM TANTALATE; PYRO-ELECTRIC DETECTORS; PYROELECTRIC; PYROELECTRIC COEFFICIENTS; RF-MAGNETRON SPUTTERING;

DETECTORS; DIELECTRIC MATERIALS; LITHIUM; LITHIUM COMPOUNDS; MAGNETRON SPUTTERING; MAGNETRONS; RUTHENIUM COMPOUNDS; SILICON NITRIDE;

THIN FILMS;

EID: 46749120507     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/00150190701368190     Document Type: Conference Paper

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