900 keV gold ion sputter etching of silicon and metals

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 14, 2008, Pages 3330-3331

  Glass, Gary A ^a   Dias, Johnny F ^a   Dymnikov, Alexander D ^a   Rout, Bibhudutta ^b  

^a UNIVERSITY OF LOUISIANA AT LAFAYETTE   (United States)

^b UNIVERSITY OF NORTH TEXAS   (United States)

Author keywords

Heavy ion beam lithography; High energy ion sputtering; Ion etching

Indexed keywords

FABRICATION; HEAVY IONS; MICROSTRUCTURE; REACTIVE ION ETCHING; REACTIVE SPUTTERING;

FABRICATE MICROSTRUCTURES; HEAVY ION BEAM LITHOGRAPHY; HIGH ENERGY ION SPUTTERING; ION ETCHING;

METAL IONS;

EID: 46549089666     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.03.229     Document Type: Article

References (12)

1. International Technology Roadmap for Semiconductors, 2006 Update. .
2. Lin S.Y., Fleming J.G., Hetherington D.L., Smith B.K., Biswas R., Ho K.M., Sigalas M.M., Zubrzycki W., Kurtz S.R., and Bur J. Nature (London) 394 (1998) 251
3. Peterson K.E. Proc. IEEE 70 (1982) 420
4. Madou M. Fundamentals of Microfabrication (1997), CRC Press, Boca Raton, Florida
5. Kovacs G.T.A., Mulaf N.I., and Petersen K.E. Proc. IEEE 86 8 (1998) 1536
6. Teo E.J., Liu M.H., Breese M.B.H., Tavernier E.P., Bettiol A.A., Blackwood D.J., and Watt F. Proc. SPIE 5347 (2004) 264
7. Yang P.Y., Mashanovich G.Z., Gomes-Morilla I., Headley W.R., Reed G.T., Teo E.J., Blackwood D.J., Breese M.B.H., and Betiol A.A. Appl. Phys. Lett. 90 (2007) 241109
8. Rout B., Greco R.R., Zachry D.P., Dymnikov A.D., and Glass G.A. Nucl. Instr. and Meth. B 250 (2006) 76
9. Schwind G.A., and Swanson L.W. J. Vac. Sci. Technol. B25 6 (2007) 2586
10. Machalette F., Wesch W., Juhie R., and Barth S. Rev. Sci. Instrum. 69 (1998) 1336
11. Kreissig U., Kahn A., Ruedenauer F.G., and Steiger W. J. Phys. D: Appl. Phys. 23 (1990) 959
12. J.F. Ziegler, M.D. Ziegler, J.P. Biersack, Stopping and Range of Ions in Matter (SRIM), 2006. (www.srim.org).