Emission characteristics of Au60 Be40 and Au62 Si23 Be15 liquid metal ion sources

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2586-2592

  Schwind, G A ^a   Swanson, L W ^a  

^a Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION CURRENTS; FIELD EVAPORATION; TOTAL ENERGY DISTRIBUTIONS (TED);

CURRENT DENSITY; ELECTRIC POWER DISTRIBUTION; IONIZATION; TERNARY SYSTEMS;

LIQUID METALS;

EID: 37149030924     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2781520     Document Type: Article

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