The effect of heat-treatment on the structure and chemical homogeneity of ferroelectrics PLZT thin films deposited by R.F. sputtering

Materials Chemistry and Physics

Volumn 88, Issue 1, 2004, Pages 77-83

  Wang, J ^a   Wu, Z G ^a   Yuan, X M ^a   Jiang, S R ^a   Yan, P X ^a  

^a LANZHOU UNIVERSITY   (China)

Author keywords

Heat treatment; Lanthanum modified lead zirconate titanate; Perovskite structure; Thin films; XPS

Indexed keywords

DEPOSITION; ELECTRODES; HEAT TREATMENT; LANTHANUM; LEAD COMPOUNDS; MAGNETRON SPUTTERING; PEROVSKITE; TITANIUM; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM;

COMPOSITION HOMOGENEITY; ELECTRODE MATERIALS; LANTHANUM-MODIFIED LEAD ZIRCONATE TITANATE; PEROVSKITE STRUCTURE;

THIN FILMS;

EID: 4644294476     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2004.06.018     Document Type: Article

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