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Volumn 43, Issue 7 A, 2004, Pages 4124-4128
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Investigation of PtNb alloy electrodes for ferroelectric Pb(Zr, Ti)O 3 thin film capacitors
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Author keywords
Alloy; Electrode; Fatigue; FeRAM; PtNb; PZT
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Indexed keywords
ANNEALING;
CAPACITORS;
DEPOSITION;
ELECTRODES;
FATIGUE OF MATERIALS;
MAGNETRON SPUTTERING;
MORPHOLOGY;
NIOBIUM ALLOYS;
PLATINUM ALLOYS;
RECRYSTALLIZATION (METALLURGY);
TEMPERATURE CONTROL;
THIN FILMS;
CHEMICAL SOLUTION DEPOSITION (CSD);
CLUSTER-LIKE STRUCTURES;
FERAM;
OXIDE ELECTRODES;
PLATE-LIKE CRYSTALS;
FERROELECTRIC MATERIALS;
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EID: 4644291330
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/JJAP.43.4124 Document Type: Article |
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Times cited : (2)
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References (16)
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