Thermal AFM: A thermopile case study

Ultramicroscopy

Volumn 101, Issue 2-4, 2004, Pages 153-159

  Fonseca, L ^a   Perez Murano F ^a   Calaza, C ^b   Rubio, R ^a   Santander, J ^a   Figueras, E ^a   Gracia I ^a   Cane C ^a   Moreno, M ^b   Marco, S ^b  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

07.10.Cm; 61.16Ch; 85.80Fi; Atomic force microscopy; Micromechanical devices; Thermal probing; Thermopiles

Indexed keywords

ATOMIC FORCE MICROSCOPY; INFRARED IMAGING; MICROMACHINING; SENSORS;

INTEGRATED THERMAL SENSORS; MICROMACHINED THERMOPILES; SPATIAL DISTRIBUTION;

THERMOPILES;

ARTICLE; ATOMIC FORCE MICROSCOPY; IMAGING; MICROSCOPE; SCANNING PROBE MICROSCOPY; STRUCTURE ANALYSIS; TEMPERATURE; THERMAL ANALYSIS;

DIAGNOSTIC IMAGING; MICROSCOPY, ATOMIC FORCE; OXADIAZOLES; SEMICONDUCTORS; TEMPERATURE;

EID: 4644255507     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2004.05.004     Document Type: Article

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