A Zinc Oxide modified porous silicon humidity sensor

Proceedings of IEEE ICIA 2006 - 2006 IEEE International Conference on Information Acquisition

Volumn , Issue , 2006, Pages 1158-1162

  Jiang, Tao ^a   Zhou, Xiaofeng ^a   Zhang, Jian ^a   Shi, Yanling ^a   Luo, Tianxing ^a  

^a EAST CHINA NORMAL UNIVERSITY   (China)

Author keywords

Humidity sensor; Modified Porous Silicon; Sol gel; Zinc Oxide

Indexed keywords

ATMOSPHERIC HUMIDITY; COLLOIDS; DETECTORS; ELECTRIC CONDUCTIVITY; GELATION; GELS; HUMIDITY SENSORS; LITHOGRAPHY; MERGERS AND ACQUISITIONS; METEOROLOGY; MOISTURE; OXIDES; SEMICONDUCTING ZINC COMPOUNDS; SENSORS; SILICON; SILICONES; SOL-GEL PROCESS; SOL-GELS; SOLS; ZINC; ZINC OXIDE; ZINC SULFIDE;

(100) SILICON; APPLIED (CO); ETCHING PROCESSES; HUMIDITY LEVELS; INFORMATION ACQUISITIONS; INTERNATIONAL CONFERENCES; POROUS SILICON SUBSTRATES; RELATIVE HUMIDITY (RH); RESPONSE TIME; SILICON STRUCTURES; SOL - GEL; SOL-GEL PRECURSORS;

POROUS SILICON;

EID: 46249099797     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICIA.2006.305909     Document Type: Conference Paper

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