Design and fabrication of a micro electromagnetic actuator

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Volumn , Issue , 2006, Pages 353-356

  Liu, Bendong ^a   Li, DeSheng ^a   Yang, Xiaobo ^a   Li, Xiang ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Electromagnetic micro relay; MEMS; Micro actuator

Indexed keywords

ACTUATORS; ELECTROMAGNETS; ELECTROPLATING; HEALTH; MAGNETIC CIRCUITS; METALLIZING; MOLECULES; NEMS; OPTICAL DESIGN; PHOTORESISTS; POLYMERS; PROCESS DESIGN; PROCESS ENGINEERING;

(E ,3E) PROCESS; CANTILEVER DISPLACEMENT; ELECTRO-MAGNETIC ACTUATOR (EMA); ELECTROMAGNETIC (EM); EXCITING COILS; INTERNATIONAL CONFERENCES; MAGNETIC (CE); MAGNETIC FORCES; MICRO ACTUATORS; MICRO ELECTROMAGNETIC ACTUATOR; MICRO RELAYS; MICROELECTROMECHANICAL-SYSTEMS (MEMS) TECHNOLOGY; MOLECULAR SYSTEMS; OPTIMIZED STRUCTURES; PERMALLOY (NI80FE20); POLY-IMIDE FILMS;

MAGNETIC MATERIALS;

EID: 46149096732     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2006.334757     Document Type: Conference Paper

References (5)

1. Chang Liu, and Yong W. Yi, "Micro machined Magnetic Actuators Using Electroplated Permalloy", IEEE TRANSACTIONS ON MAGNETICS, VOL. 35, NO. 3, MAY 1999, PP: 1976-1986.
2. E. Fullin, J. Gobetl, H.A.C. Tilmans, and J. Bergqvist, "A NEW BASIC TECHNOLOGY FOR MAGNETIC MICRO-ACTUATORS" MEMS 98 Workshop, Heidelberg, January 25-29, 1998, PP: 88-93.
3. William P. Taylor, Oliver Brand, and Mark G. Allen, "Fully Integrated Magnetically Actuated Micromachined Relays" JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 7, NO. 2, JUNE 1998, PP:181-1883.
4. C. H. Ko, J. J. Yang, J. C. Chiou, "Efficient magnetic microactuator with an enclosed magnetic core", 2002 Society of Photo-Optical Instrumentation Engineers, pp: 144-200.
5. John A. Wright, Yu-Chong Tai and Shih-Chia Chang, A Large-Force, Fully-Integrated MEMS Magnetic Actuator, Transducers '97,Vol. 2. Chicago, IL, pp: 793-796