Oxidative degradation of parylene C (Poly (monochloro-para-xylylene)) thin films on bulk micromachined piezoresistive silicon pressure sensors

Sensors and Materials

Volumn 9, Issue 5, 1997, Pages 307-319

  Monk, David J ^a   Toh, H S ^a   Wertz, John ^a  

^a MOTOROLA INC   (United States)

Author keywords

Bulk micromachined silicon; High temperature exposure; Media compatibility; Oxidative degradation; Parylene c; Piezoresistive; Poly(monochloro para xylylene); Pressure sensor

Indexed keywords

EID: 20544435274     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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