Recent advances in FIB technology for nano-prototyping and nano-characterisation

Materials Research Society Symposium Proceedings

Volumn 1020, Issue , 2007, Pages 15-20

  Stokes, Debbie J ^a   Roussel, Laurent ^a   Wilhelmi, Oliver ^a   Giannuzzi, Lucille A ^a   Hubert, Dominique H W ^a  

^a Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE MATERIALS; ELECTRONS; IN SITU PROCESSING; ION BEAMS; IONS; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY;

FIB SEM; NANO-PROTOTYPING; RECENT PROGRESS; STATE OF THE ART; ULTRAHIGH RESOLUTION;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

EID: 45749119481     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-1020-gg01-05     Document Type: Conference Paper

References (11)

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2. Morrissey, F., Reyntjens, S, Nakahara, K and Jiao, C., Methods for Structuring and Prototyping on a Nanoscale Using a DualBeam. Microsc. Microanal., 2005. 11(Suppl 2)
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