FIB preparation for HRTEM: GaN based devices

Microscopy and Microanalysis

Volumn 10, Issue SUPPL. 2, 2004, Pages 1142-1143

  Jinschek, J R ^a   Radmilovic, V ^a   Kisielowski, Ch ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4544367211     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S1431927604881844     Document Type: Conference Paper

References (5)

1. M.V. Moore, Microsc. Microanal. 8 (Suppl. 2) (2002) 60.
2. N.I.Kato, Y. Kohno, H. Saka, J. Vac. Sci. Technol. A 17(4) (1999) 1201.
3. nd Edition, Springer, Berlin (1998) 212.
4. C. Kisielowski, Z. Lilienthal-Weber, S. Nakamura, Jpn. J. Appl. Phys. 36 (1997) 6932.
5. This research was supported by the Office of Science, US Department of Energy under a CRADA (Cooperative Research and Development Agreement) between Lawrence Berkeley National Laboratory (LBNL) and Lumileds Lighting, San Jose / CA under US DOE Contract DE-AC03-76SF00098. J.R. Jinschek was supported by a Feodor-Lynen-Fellowship of the Alexander von Humboldt-Foundation (Germany).